In order to avoid secondary pollution， in actual production， products are usually pre-packaged for RF treatment. Therefore， it is particularly important to study the influence of RF treatment on the inner and outer packaging materials. In this paper， pepper powder as Installation， EVOH/PA film as external packaging material， using 6 kW， 27.12 MHz RF equipment for sterilization， the key factors affecting the heating rate in the RF process were studied. It was found that with the increase of electrode gap， the electric field strength and the RF output power decreases， so the heating rate of the packaging decreases. With the increase of the moisture content of the pepper powder the dielectric loss factor increases， so the heating rate of the packaging decreases. The total number of colonies at different temperature and the pepper powder's color with the optimal sterilization temperature were studied. The results showed that when the temperature of RF treatment reached 80 ℃， it had almost no bacteria detected. Moreover， this temperature had no significant effect on its color. The effects of RF treatment on the external packaging materials were studied. The results showed that the mechanical and barrier properties of EVOH/PA packaging films were not significantly affected by RF treatment. Therefore， RF treatment can be used as a new and effective sterilization method of pre-packaged pepper powder.